Tooj Thaj Tsam Luam Hlau

Kub muag rau nines high purity copper nyias films ntawm tus pheej yig nqe 1.Simple kev qhia rau tooj liab nyias nyias Cov khab tooj liab nyias tau cog hauv cov ntsug MOCVD (Hlau-Cov Tshuaj Hloov Tshuaj Tus Dej Haus) reactor siv bis (2,2,6,6 -tetramethyl-3,5-heptanedionato) tooj liab (II), Cu (thd) 2, raws li ...

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Kub muag rau nines siab purity copper nyias films ntawm pheej yig tus nqi

1. Piav kev qhia txog tooj liab hlau nyias

Nyuaj tooj liab cov yeeb yaj kiab tau cog hauv MokVD ntsug (Hlau-Organic Tshuaj Vapor Deposition) reactor siv bis (2,2,6,6-tetramethyl-3,5-heptanedionato) tooj liab (II), Cu (thd) 2, raws li precursor. Qhov tso tawm tau raug tawm hauv qhov chaw ntshiab hydrogen (qhov siab: 3, 20 mbar) ntawm cov substrate txawv (350-750 ° C). Cov yeeb yaj kiab tau tshawb xyuas los ntawm tus qauv ntsuas, kev ntsuas plaub-point, ESCA, AES, XRD, AFM, thiab Normarsky microscopy. Ib qho txawv txav ntawm cov zaj duab xis thickness nrog deposition lub sij hawm tau raug pom. Kev loj hlob ceev ceev tshwm sim nyob rau thawj feeb uas ua rau cov yeeb yaj kiab tsim txom (thickness nram qab no 1000 03). Zoo hluav taws xob tiv thaiv tau raug tau siab tshaj 2000 03. Siv AFM tau siv cov ntaub ntawv hais txog qhov cov qauv ntawm cov yeeb yaj kiab uas muaj ntau yam sib txawv. Cov qoob loj thiab qhov chaw nto kab nce nrog ntau zuj zus tuaj. Cov qoob me me loj hlob tuaj thaum pib thiab cov hluav taws xob khoom raug tswj hwm los ntawm cov Ohmic cov kab txuas ntau ntawm cov tib neeg cov nplej.

2. Cia siab rau peb cov yeeb yaj kiab purity zoo nyias

Cov Ntsiab Lus Uas Xeem (mg / Kg)

Kev soj ntsuam

Cov Ntsiab Lus Uas Xeem (mg / Kg)

Kev soj ntsuam

Cov Ntsiab Lus Uas Xeem (mg / Kg)

Kev soj ntsuam

Li

<>

Ga

<>

Nd

<>

Yuav tsum

<>

D?

<>

Sm

<>

B

<>

Raws li

0.033

Eu

<>

C

-

Se

<>

Gd

<>

N

-

Br

<>

Tb

<>

O

-

Rb

<>

Dy

<>

F

<>

Sr

<>

Ho

<>

Lus nug

0.016

Y

<>

Er

<>

Mg

<>

Zr

<>

Tm

<>

Al

<>

Nb

<>

Yb

<>

Si

0.034

Mo

<>

Lu

<>

P

<>

Ru

<>

Hf

<>

S

<>

Rh

<>

Ta

<>

Cl

<>

Pd

<>

W

<>

K

0.055

Ag

0.015

Re

<>

Ca

<>

Cd

<>

Os

<>

Sc

<>

Nyob rau hauv

<>

Ir

<>

Ti

<>

Sn

<>

Pt

<>

V

<>

Sb

<>

Au

<>

Cr

<>

Te

<>

Hg

<>

Mn

<>

Kuv

<>

Tl

<>

Fe

<>

Cs

<>

Pb

<>

Co

<>

Ba

<>

Bi

<>

Ni

<>

La

<>

Th

<>

Cu

Hauv paus

Wb

<>

U

<>

Zn

<>

Pr

<>

Tshaj

Tshaj

3.Physial cov khoom thiab lwm tus

Kev ceev

8.98g / m 3

Melting Point

1083 ± 0.2 ℃

Thermal Conductivity

0.94Cal / cmse ℃

Thermal Capacity (25 ℃)

442-446 J / kg K

Hluav taws xob Resistivity

1.8-2.0μohm-cm

Hluas Modulus

130GPa @ 300K

Coefficient ntawm Thermal Expansion (0-30 ℃)

16.0-16.2μm / m ℃

Coefficient Ntawm Thermal Expansion (50-100 ℃)

17.9-18.1μm / m ℃

Tshuab tam sim no (Sij hawm: 3s Ntev: 2m)

0.974A

4. Daim ntawv thov pleev zaj duab xis

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Semiconductor
Nyias zaj duab xis PV
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Pawg Lej Txiav Tawm


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